Issued Patents All Time
Showing 76–100 of 153 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9994955 | Raw material vaporization and supply apparatus | Atsushi Hidaka, Masaaki Nagase, Satoru Yamashita, Nobukazu Ikeda | 2018-06-12 |
| 9983051 | Fastening structure for brittle-fracturable panel, and method for fastening light transmission window panel comprising brittle-fracturable panel employing same | Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Michio Yamaji, Tadayuki Yakushijin | 2018-05-29 |
| 9921089 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2018-03-20 |
| 9870006 | Pressure type flow control system with flow monitoring | Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda, Katsuyuki Sugita | 2018-01-16 |
| 9841770 | Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device | Kaoru Hirata, Nobukazu Ikeda, Ryousuke Dohi, Katsuyuki Sugita, Masaaki Nagase | 2017-12-12 |
| 9791867 | Flow control device equipped with flow monitor | Masaaki Nagase, Atsushi Hidaka, Nobukazu Ikeda | 2017-10-17 |
| 9746856 | Multi-hole orifice plate for flow control, and flow controller using the same | Kaoru Hirata, Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda +2 more | 2017-08-29 |
| 9733649 | Flow control system with build-down system flow monitoring | Masaaki Nagase, Atsushi Hidaka, Nobukazu Ikeda | 2017-08-15 |
| 9702781 | Leakage detection device and fluid controller including same | Ryousuke Dohi, Tsutomu Shinohara, Toshio Doh, Nobukazu Ikeda, Michio Yamaji | 2017-07-11 |
| 9651467 | Raw material fluid density detector | Yoshihiro Deguchi, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Michio Yamaji +1 more | 2017-05-16 |
| 9638560 | Calibration method and flow rate measurement method for flow rate controller for gas supply device | Masaaki Nagase, Nobukazu Ikeda, Yohei Sawada, Tooru Hirai, Kazuyuki Morisaki +1 more | 2017-05-02 |
| 9632511 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda, Katsuyuki Sugita | 2017-04-25 |
| 9631777 | Raw material vaporizing and supplying apparatus equipped with raw material concentration | Masaaki Nagase, Kaoru Hirata, Atushi Hidaka, Nobukazu Ikeda, Takeshi Nakamura | 2017-04-25 |
| 9574917 | Pressure type flow rate control device | Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda | 2017-02-21 |
| 9556518 | Raw material gas supply apparatus for semiconductor manufacturing equipment | Masaaki Nagase, Atsushi Hidaka, Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda | 2017-01-31 |
| 9507352 | Variable orifice type pressure-controlled flow controller | Ryousuke Dohi, Yohei Sawada, Nobukazu Ikeda | 2016-11-29 |
| 9494947 | Pressure type flow control system with flow monitoring | Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda, Katsuyuki Sugita | 2016-11-15 |
| 9477232 | Apparatus for dividing and supplying gas and method for dividing and supplying gas | Eiji Takahashi, Norikazu Sasaki, Atsushi Sawachi, Yohei Sawada, Nobukazu Ikeda +1 more | 2016-10-25 |
| 9383758 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2016-07-05 |
| 9261884 | Apparatus for dividing and supplying gas and method for dividing and supplying gas by use of this apparatus | Yohei Sawada, Nobukazu Ikeda, Ryousuke Dohi | 2016-02-16 |
| 9233347 | Mixed gas supply device | Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda | 2016-01-12 |
| 9200725 | Opening degree detection device for manual valve | Ryousuke Dohi, Atsuo Tomita, Nobukazu Ikeda, Hideyuki Miyagawa | 2015-12-01 |
| 9169558 | Fluid control apparatus | Jun Hirose, Kazuyuki Tezuka, Yohei Uchida, Mutsunori Koyomogi, Takahiro Matsuda +2 more | 2015-10-27 |
| 9163969 | Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply device | Yohei Sawada, Masaaki Nagase, Nobukazu Ikeda, Ryousuke Dohi | 2015-10-20 |
| 9163743 | Piezoelectrically driven valve and piezoelectrically driven flow rate control device | Atsushi Hidaka, Kaoru Hirata, Masaaki Nagase, Nobukazu Ikeda, Ryousuke Dohi | 2015-10-20 |