Issued Patents All Time
Showing 51–75 of 153 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838435 | Pressure-type flow rate control device | Kaoru Hirata, Katsuyuki Sugita, Nobukazu Ikeda | 2020-11-17 |
| 10665430 | Gas supply system, substrate processing system and gas supply method | Atsushi Sawachi, Norihiko Amikura, Yohei Sawada, Yoshiharu Kishida | 2020-05-26 |
| 10648572 | Valve with built-in orifice, and pressure-type flow rate control device | Yohei Sawada, Kaoru Hirata, Masaaki Nagase, Nobukazu Ikeda | 2020-05-12 |
| 10646844 | Vaporization supply apparatus | Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Takatoshi NAKATANI +3 more | 2020-05-12 |
| 10641407 | Flow rate control device | Toru Hirai, Kazuyuki Morisaki, Kaoru Hirata, Nobukazu Ikeda | 2020-05-05 |
| 10604840 | Liquid level indicator and liquid raw material vaporization feeder | Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Satoru Yamashita, Keiji Hirao +1 more | 2020-03-31 |
| D879248 | Fluid control valve unit | Kohei Shigyou, Takashi Hirose, Ryousuke Dohi, Naofumi Yasumoto | 2020-03-24 |
| 10573801 | Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device | Kohei Shigyou, Takashi Hirose, Ryousuke Dohi, Naofumi Yasumoto | 2020-02-25 |
| 10534376 | Gas divided flow supplying apparatus for semiconductor manufacturing equipment | Ryousuke Dohi, Kaoru Hirata, Katsuyuki Sugita, Nobukazu Ikeda | 2020-01-14 |
| 10408742 | Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method | Masaaki Nagase, Nobukazu Ikeda, Michio Yamaji, Shigetoshi Sugawa, Rihito Kuroda | 2019-09-10 |
| 10386861 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda, Katsuyuki Sugita | 2019-08-20 |
| 10385998 | Fixing structure for seal member in fluid control apparatus, joint, and fluid control apparatus | Kohei Shigyou, Takashi Hirose, Ryousuke Dohi, Naofumi Yasumoto | 2019-08-20 |
| 10386863 | Pressure-type flow controller | Kaoru Hirata, Nobukazu Ikeda, Ryousuke Dohi, Katsuyuki Sugita | 2019-08-20 |
| 10372145 | Pressure-type flow rate control device | Takashi Hirose, Toshihide Yoshida, Atsushi Matsumoto, Kaoru Hirata, Nobukazu Ikeda +2 more | 2019-08-06 |
| 10324029 | Concentration measurement device | Yoshihiro Deguchi, Masaaki Nagase, Michio Yamaji, Nobukazu Ikeda, Masayoshi Kawashima +1 more | 2019-06-18 |
| 10309561 | Flow passage sealing structure | Ryousuke Dohi, Naofumi Yasumoto, Nobukazu Ikeda | 2019-06-04 |
| 10274356 | Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container | Kaoru Hirata, Katsuyuki Sugita, Atsushi Hidaka, Nobukazu Ikeda | 2019-04-30 |
| 10261522 | Pressure-type flow rate control device | Masaaki Nagase, Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda | 2019-04-16 |
| 10174858 | Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve | Kaoru Hirata, Katsuyuki Sugita, Ryousuke Dohi, Nobukazu Ikeda | 2019-01-08 |
| 10156295 | Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device | Naofumi Yasumoto, Ryousuke Dohi, Nobukazu Ikeda, Kohei Shigyou | 2018-12-18 |
| 10073469 | Flow meter and flow control device provided therewith | Masaaki Nagase, Nobukazu Ikeda, Ryousuke Dohi, Atsushi Hidaka, Katsuyuki Sugita | 2018-09-11 |
| 10030789 | Diaphragm valve | Tsutomu Shinohara, Michio Yamaji, Ryousuke Dohi, Nobukazu Ikeda, Toshio Doh | 2018-07-24 |
| 10012334 | Structure for attaching pressure detector | Ryousuke Dohi, Nobukazu Ikeda, Masaki Fukasawa, Katsumi Ishiguro | 2018-07-03 |
| D820395 | Joint member for a fluid controller | Kohei Shigyou, Takashi Hirose, Ryousuke Dohi, Naofumi Yasumoto | 2018-06-12 |
| D820394 | Fluid control valve unit | Kohei Shigyou, Takashi Hirose, Ryousuke Dohi, Naofumi Yasumoto | 2018-06-12 |