Issued Patents All Time
Showing 101–125 of 153 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9133951 | Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed | Tadahiro Ohmi, Ryousuke Dohi, Nobukazu Ikeda, Masaaki Nagase, Kaoru Hirata +6 more | 2015-09-15 |
| 9098082 | Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller | Kazuhiko Sugiyama, Nobukazu Ikeda, Ryousuke Dohi, Toyomi Uenoyama | 2015-08-04 |
| 9038663 | Opening degree detection device for automatically operated valve | Ryousuke Dohi, Atsuo Tomita, Yohei Sawada, Nobukazu Ikeda | 2015-05-26 |
| 9010369 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2015-04-21 |
| 8931506 | Gas supply apparatus equipped with vaporizer | Atsushi Nagata, Masaaki Nagase, Atsushi Hidaka, Kaoru Hirata, Atsushi Matsumoto +2 more | 2015-01-13 |
| 8833730 | Cam control valve | Yohei Sawada, Ryousuke Dohi, Nobukazu Ikeda | 2014-09-16 |
| 8757197 | Automatic pressure regulator for flow rate regulator | Kaoru Hirata, Katsuyuki Sugita, Ryousuke Dohi, Nobukazu Ikeda | 2014-06-24 |
| 8724974 | Vaporizer | Tadahiro Ohmi, Yasuyuki Shirai, Masaaki Nagase, Satoru Yamashita, Atsushi Hidaka +3 more | 2014-05-13 |
| 8714188 | Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used | Tadahiro Ohmi, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Ryutaro Nishimura | 2014-05-06 |
| 8662471 | Solenoid valve | Tadahiro Ohmi, Tsuyoshi Tanigawa, Michio Yamaji, Nobukazu Ikeda, Ryousuke Dohi | 2014-03-04 |
| 8601976 | Gas supply system for semiconductor manufacturing facilities | Ryousuke Dohi, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Nobukazu Ikeda | 2013-12-10 |
| 8606412 | Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus | Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kaoru Hirata, Katsuyuki Sugita +1 more | 2013-12-10 |
| 8587180 | Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function | Katsuyuki Sugita, Nobukazu Ikeda, Ryousuke Dohi, Kaoru Hirata, Takatoshi NAKATANI | 2013-11-19 |
| 8561966 | Cam valve | Ryousuke Dohi, Nobukazu Ikeda, Yohei Sawada | 2013-10-22 |
| 8555920 | Flow rate ratio variable type fluid supply apparatus | Kaoru Hirata, Yohei Sawada, Ryousuke Dohi, Nobukazu Ikeda | 2013-10-15 |
| 8496022 | Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller | Kazuhiko Sugiyama, Nobukazu Ikeda, Ryousuke Dohi, Toyomi Uenoyama | 2013-07-30 |
| 8418714 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2013-04-16 |
| 8191856 | Piezoelectric element driven metal diaphragm control valve | Atsushi Matsumoto, Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda | 2012-06-05 |
| 8181932 | Normally open type piezoelectric element driven metal diaphragm control valve | Atsushi Matsumoto, Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda | 2012-05-22 |
| 8162286 | Piezoelectric driven control valve | Yohei Sawada, Kaoru Hirata, Ryosuke Dohi, Nobukazu Ikeda | 2012-04-24 |
| 8047510 | Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith | Kaoru Hirata, Masaaki Nagase, Atsushi Hidaka, Atsushi Matsumoto, Ryousuke Dohi +1 more | 2011-11-01 |
| 8047225 | Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used | Tadahiro Ohmi, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Ryutaro Nishimura | 2011-11-01 |
| 8020574 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Tadahiro Ohmi, Nobukazu Ikeda, Masaaki Nagase, Kyousuke Dohi, Ryutaro Nishimura | 2011-09-20 |
| 7945414 | Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor | Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kaoru Hirata, Katsuyuki Sugita +1 more | 2011-05-17 |
| 7926509 | Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method | Tadahiro Ohmi, Kazuhiko Sugiyama, Kenetu Mizusawa, Eiji Takahashi, Tomio Uno +3 more | 2011-04-19 |