Issued Patents All Time
Showing 126–150 of 153 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7849869 | Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used | Tadahiro Ohmi, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Ryutaro Nishimura | 2010-12-14 |
| 7798167 | Internal pressure controller of chamber and internal pressure subject-to-control type chamber | Tadahiro Ohmi, Akniobu Teramoto, Tomio Uno, Ryousuke Dohi, Osamu Nakamura +3 more | 2010-09-21 |
| 7669455 | Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device | Tadahiro Ohmi, Kazuhiko Sugiyama, Shoichi Hino, Eiji Takahashi, Makoto Saegusa +4 more | 2010-03-02 |
| 7654137 | Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed | Kaoru Hirata, Nobukazu Ikeda, Ryousuke Dohi | 2010-02-02 |
| 7594517 | Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed | Hiroshi Kannan, Tomio Uno, Ryousuke Dohi, Osamu Nakamura, Atsushi Matsumoto +1 more | 2009-09-29 |
| 7367241 | Differential pressure type flowmeter and differential pressure type flow controller | Tadahiro Ohmi, Kazuhiko Sugiyama, Tomio Uno, Nobukazu Ikeda, Osamu Nakamura +2 more | 2008-05-06 |
| 7363810 | Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same | Nobukazu Ikeda, Kaoru Hirata, Ryousuke Dohi | 2008-04-29 |
| 7278437 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Tadahiro Ohmi, Nobukazu Ikeda, Masaaki Nagase, Ryousuke Dohi, Ryutaro Nishimura | 2007-10-09 |
| 7219533 | Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method | Tadahiro Ohmi, Masaaki Nagase, Ryousuke Dohi, Osamu Nakamura, Tomio Uno +1 more | 2007-05-22 |
| 7150444 | Valve with an integral orifice | Tadahiro Ohmi, Nobukazu Ikeda, Michio Yamaji, Ryousuke Dohi, Eiji Ideta +1 more | 2006-12-19 |
| 7085628 | Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus | Tadahiro Ohmi, Tomio Uno, Osamu Nakamura, Nobukazu Ikeda, Ryousuke Dohi +2 more | 2006-08-01 |
| 7080658 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Tadahiro Ohmi, Nobukazu Ikeda, Masaaki Nagase, Kyousuke Dohi, Ryutaro Nishimura | 2006-07-25 |
| 7059363 | Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system | Kazuhiko Sugiyama, Nobukazu Ikeda, Ryosuke Dohi, Toyomi Uenoyama | 2006-06-13 |
| 6964279 | Pressure-type flow rate control apparatus | Tadahiro Ohmi, Tomio Uno, Osamu Nakamura, Nobukazu Ikeda, Ryousuke Dohi +5 more | 2005-11-15 |
| 6871803 | Valve with an integral orifice | Tadahiro Ohmi, Nobukazu Ikeda, Michio Yamaji, Ryousuke Dohi, Eiji Ideta +1 more | 2005-03-29 |
| 6848470 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Ryousuke Dohi +13 more | 2005-02-01 |
| 6820632 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Ryousuke Dohi +13 more | 2004-11-23 |
| 6606912 | Structure or construction for mounting a pressure detector | Tadahiro Ohmi, Takashi Hirose, Eiji Ideta, Nobukazu Ikeda, Ryousuke Dohi +6 more | 2003-08-19 |
| 6450190 | Method of detecting abnormalities in flow rate in pressure-type flow controller | Tadahiro Ohmi, Seiichi Iida, Satoshi Kagatsume, Jun Hirose, Kazuo Fukasawa +6 more | 2002-09-17 |
| 6422264 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Ryousuke Dohi +13 more | 2002-07-23 |
| 6394415 | Fluid control valve and fluid supply/exhaust system | Tadahiro Ohmi, Migaku Takahashi, Michio Yamaji, Tsuyoshi Tanikawa, Nobukazu Ikeda +5 more | 2002-05-28 |
| 6314992 | Fluid-switchable flow rate control system | Tadahiro Ohmi, Satoshi Kagatsume, Jun Hirose | 2001-11-13 |
| 6302130 | Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers | Tadahiro Ohmi, Seiichi Iida, Satoshi Kagatsume, Jun Hirose, Nobukazu Ikeda +7 more | 2001-10-16 |
| 6289923 | Gas supply system equipped with pressure-type flow rate control unit | Tadahiro Ohmi, Satoshi Kagatsume, Nobukazu Ikeda, Kazuhiro Yoshikawa, Eiji Ideta +3 more | 2001-09-18 |
| 6193212 | Fluid control valve and fluid supply/exhaust system | Tadahiro Ohmi, Migaku Takahashi, Michio Yamaji, Tsuyoshi Tanikawa, Nobukazu Ikeda +5 more | 2001-02-27 |