Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7798167 | Internal pressure controller of chamber and internal pressure subject-to-control type chamber | Tadahiro Ohmi, Tomio Uno, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura +3 more | 2010-09-21 |