Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9098082 | Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller | Kazuhiko Sugiyama, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi | 2015-08-04 |
| 8496022 | Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller | Kazuhiko Sugiyama, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi | 2013-07-30 |
| 7669455 | Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device | Tadahiro Ohmi, Kazuhiko Sugiyama, Shoichi Hino, Eiji Takahashi, Makoto Saegusa +4 more | 2010-03-02 |
| 7059363 | Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system | Kazuhiko Sugiyama, Nobukazu Ikeda, Kouji Nishino, Ryosuke Dohi | 2006-06-13 |
| 6848470 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2005-02-01 |
| 6820632 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2004-11-23 |
| 6422264 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2002-07-23 |