Issued Patents All Time
Showing 76–100 of 161 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558239 | Polishing apparatus | Junji Kunisawa | 2003-05-06 |
| 6558229 | Polishing apparatus | Hideji Isobe, Kazuo Shimizu, Hiroyuki Osawa | 2003-05-06 |
| 6544111 | Polishing apparatus and polishing table therefor | Yu Ishii | 2003-04-08 |
| 6521568 | Plant disease controlling compositions and plant disease controlling method | — | 2003-02-18 |
| 6443821 | Workpiece carrier and polishing apparatus having workpiece carrier | Hozumi Yasuda | 2002-09-03 |
| 6443820 | Polishing apparatus | — | 2002-09-03 |
| 6439980 | Workpiece carrier and polishing apparatus having workpiece carrier | — | 2002-08-27 |
| 6432258 | Apparatus for and method of polishing workpiece | Hozumi Yasuda | 2002-08-13 |
| 6428403 | Polishing apparatus | Hozumi Yasuda | 2002-08-06 |
| 6416384 | Method and apparatus for polishing | Takayoshi Kawamoto, Hozumi Yasuda, Hiroshi Yoshida | 2002-07-09 |
| 6413357 | Polishing apparatus | Tetsuji Togawa, Seiji Katsuoka, Toyomi Nishi | 2002-07-02 |
| 6413156 | Method and apparatus for polishing workpiece | Noburu Shimizu | 2002-07-02 |
| 6406364 | Polishing solution feeder | Hirokuni Hiyama, Yutaka Wada, Kiyotaka Kawashima, Manabu Tsujimura, Takayoshi Kawamoto | 2002-06-18 |
| 6364752 | Method and apparatus for dressing polishing cloth | You Ishii, Toyomi Nishi, Takayoshi Kawamoto, Takeshi Sakurai | 2002-04-02 |
| 6354907 | Polishing apparatus including attitude controller for turntable and/or wafer carrier | Ichiju Satoh, Katsuya Okumura | 2002-03-12 |
| 6350346 | Apparatus for polishing workpiece | Masamichi Nakashiba, Isamu Watanabe, Yoko Hasegawa | 2002-02-26 |
| 6343978 | Method and apparatus for polishing workpiece | Noburu Shimizu | 2002-02-05 |
| 6329289 | Method and apparatus for forming copper wiring | — | 2001-12-11 |
| 6328629 | Method and apparatus for polishing workpiece | Tetsuji Togawa, Koji Ono | 2001-12-11 |
| 6325698 | Cleaning method and polishing apparatus employing such cleaning method | Yutaka Wada, Hirokuni Hiyama | 2001-12-04 |
| 6322434 | Polishing apparatus including attitude controller for dressing apparatus | Ichiju Satoh | 2001-11-27 |
| 6293858 | Polishing device | Toru Maruyama, Shunichiro Kojima, Seiji Katsuoka, Shin Ohwada | 2001-09-25 |
| 6294059 | Substrate plating apparatus | Akihisa Hongo, Naoaki Ogure, Hiroaki Inoue, Fumio Kuriyama, Manabu Tsujimura +2 more | 2001-09-25 |
| 6294567 | Pyrazolinone derivatives | Masaya Hashizume, Noboru Yamamoto | 2001-09-25 |
| 6196903 | Workpiece carrier and polishing apparatus having workpiece carrier | — | 2001-03-06 |