Issued Patents All Time
Showing 101–109 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8279524 | Polarization-modulating optical element | Damian Fiolka | 2012-10-02 |
| 8270077 | Polarization-modulating optical element | Damian Fiolka | 2012-09-18 |
| 8259393 | Polarization-modulating optical element | Damian Fiolka | 2012-09-04 |
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Vladimir Davydenko, Axel Scholz, Johannes Wangler | 2011-08-23 |
| 7969556 | Illumination optical system for microlithography and illumination system and projection exposure system with an illumination optical system of this type | — | 2011-06-28 |
| 7605386 | Optical device with raster elements, and illumination system with the optical device | Wolfgang Singer, Johannes Wangler, Birgit Kuerz, Christoph Menke | 2009-10-20 |
| 7551263 | Device for adjusting the illumination dose on a photosensitive layer | Toralf Gruner | 2009-06-23 |
| 7542217 | Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus | Wolfgang Singer, Birgit Kuerz, Rafael Egger, Johannes Wangler, Manfred Maul | 2009-06-02 |
| 7511886 | Optical beam transformation system and illumination system comprising an optical beam transformation system | Joerg Schultz, Markus Brotsack, Gerhard Fuerter, Wolfgang Singer, Manfred Maul +2 more | 2009-03-31 |