Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7095480 | Cooling apparatus | Shinichi Hara, Yoshinori Miwa, Yasuo Hasegawa, Yoshiki Kino | 2006-08-22 |
| 7078706 | Chamber, exposure apparatus, and device manufacturing method | — | 2006-07-18 |
| 7054079 | Optical element holder, exposure apparatus, and device fabricating method | — | 2006-05-30 |
| 6951766 | Correcting device, exposure apparatus, device production method, and device produced by the device production method | Nobuyoshi Tanaka | 2005-10-04 |
| 6934003 | Exposure apparatus and device manufacturing method | Noriyasu Hasegawa, Shigeru Terashima | 2005-08-23 |
| 6829034 | Exposure apparatus and device manufacturing method | Yoshinori Miwa | 2004-12-07 |
| 6495847 | Stage control apparatus and exposure apparatus | Toshiya Asano, Mitsuru Inoue | 2002-12-17 |
| 6293972 | Process for fluorinating cellulosic materials and fluorinated cellulosic materials | Fumihiko Yamaguchi | 2001-09-25 |
| 6097790 | Pressure partition for X-ray exposure apparatus | Takayuki Hasegawa | 2000-08-01 |
| 6081319 | Illumination system and scan type exposure apparatus | Kunitaka Ozawa, Kazuhiro Takahashi, Youzou Fukagawa | 2000-06-27 |
| 5907390 | Positioning apparatus, exposure apparatus and method of manufacturing semiconductor device | — | 1999-05-25 |
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1998-10-13 |
| 5637142 | Nonaqueous emulsified surface treating agent composition | Motonobu Kubo, Masamichi Morita, Masayuki Yamana, Ikuo Yamamoto | 1997-06-10 |
| 5610965 | Exposure method | Makiko Mori, Kunitaka Ozawa, Koji Uda, Isamu Shimoda, Shunichi Uzawa | 1997-03-11 |
| 5577552 | Temperature controlling device for mask and wafer holders | Ryuichi Ebinuma, Takao Kariya, Nobutoshi Mizusawa, Koji Uda, Shunichi Uzawa | 1996-11-26 |
| 5524131 | Alignment apparatus and SOR x-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1996-06-04 |
| 5374829 | Vacuum chuck | Ryuichi Ebinuma, Shinichi Hara, Mitsuji Marumo | 1994-12-20 |
| 5231291 | Wafer table and exposure apparatus with the same | Mitsuaki Amemiya, Koji Uda, Kunitaka Ozawa, Kazunori Iwamoto, Shunichi Uzawa +1 more | 1993-07-27 |
| 5220171 | Wafer holding device in an exposure apparatus | Shinichi Hara, Ryuichi Ebinuma | 1993-06-15 |
| 5138643 | Exposure apparatus | Ryuichi Ebinuma, Mitsuaki Amemiya, Shunichi Uzawa, Koji Uda | 1992-08-11 |
| 5113181 | Display apparatus | Hiroshi Inoue, Atsushi Mizutome, Hideo Kanno, Yoshiyuki Osada | 1992-05-12 |
| 5093579 | Exposure apparatus with a substrate holding mechanism | Mitsuaki Amemiya, Shinichi Hara | 1992-03-03 |
| 5063582 | Liquid cooled X-ray lithographic exposure apparatus | Tetsuzo Mori, Shinichi Hara, Koji Uda, Isamu Shimoda, Shunichi Uzawa +1 more | 1991-11-05 |
| 4969168 | Wafer supporting apparatus | Shinichi Hara, Isamu Shimoda, Shunichi Uzawa | 1990-11-06 |
| 4829485 | Method of reading signals in a charge-storage line sensor in which each storage device is sequentially read and then reset during a subsequent dead time interval | Katsunori Hatanaka, Naoto Abe, Toshihiro Saika | 1989-05-09 |