Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7023561 | Exposure apparatus with interferometer | Osamu Kakuchi | 2006-04-04 |
| 6962825 | Exposure apparatus | — | 2005-11-08 |
| 6953728 | Semiconductor device and method of manufacturing thereof | Akio Nishida, Kazunori Umeda, Kousuke Okuyama, Toshiaki Yamanaka, Jiro Yugami +1 more | 2005-10-11 |
| 6924881 | Projection exposure apparatus | Osamu Kakuchi | 2005-08-02 |
| 6826442 | Stocker, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Seiji Takeuchi | 2004-11-30 |
| 6795161 | Exposure apparatus, method of manufacturing semiconductor devices and plant therefor | Masaya Ogura, Nobuaki Ogushi | 2004-09-21 |
| 6727146 | Semiconductor device and method of manufacturing thereof | Akio Nishida, Kazunori Umeda, Kousuke Okuyama, Toshiaki Yamanaka, Jiro Yugami +1 more | 2004-04-27 |
| 6677194 | Method of manufacturing a semiconductor integrated circuit device | Toshiaki Yamanaka, Akio Nishida, Yasuko Yoshida, Shuji Ikeda, Kenichi Kuroda +4 more | 2004-01-13 |
| 6633362 | Projection exposure apparatus | Osamu Kakuchi | 2003-10-14 |
| 6614535 | Exposure apparatus with interferometer | Osamu Kakuchi | 2003-09-02 |
| 6611376 | Diffractive optical element and method of manufacturing the same | Seiji Takeuchi | 2003-08-26 |
| 6569608 | Method of manufacturing an element with multiple-level surface | Ichiro Tanaka | 2003-05-27 |
| 6099598 | Fabrication system and fabrication method | Natsuki Yokoyama, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura | 2000-08-08 |
| 5896596 | Apparatus for generating massaging water stream | — | 1999-04-27 |
| 5858863 | Fabrication system and method having inter-apparatus transporter | Natsuki Yokoyama, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura | 1999-01-12 |
| 5820679 | Fabrication system and method having inter-apparatus transporter | Natsuki Yokoyama, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura | 1998-10-13 |
| 5751404 | Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates | Fumio Sakai, Shigeyuki Uzawa, Shigeki Ogawa, Tetsuya Mori | 1998-05-12 |
| 5695897 | Alignment method and semiconductor exposure method | Noriyuki Mitome, Shigeyuki Uzawa | 1997-12-09 |
| 5689494 | Surface atom fabrication method and apparatus | Masakazu Ichikawa, Shigeyuki Hosoki, Fumihiko Uchida, Shigeo Kato, Yoshihisa Fujisaki +5 more | 1997-11-18 |
| 5601686 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama +2 more | 1997-02-11 |
| 5594549 | Position detecting method and projection exposure apparatus using the same | Tetsuya Mori, Hirohiko Shinonaga | 1997-01-14 |
| 5562800 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama +2 more | 1996-10-08 |
| 5543356 | Method of impurity doping into semiconductor | Shin'icniro Kimura | 1996-08-06 |
| 5416331 | Surface atom fabrication method and apparatus | Masakazu Ichikawa, Shigeyuki Hosoki, Fumihiko Uchida, Shigeo Kato, Yoshihisa Fujisaki +5 more | 1995-05-16 |
| 5338942 | Semiconductor projections having layers with different lattice constants | Akio Nishida, Kiyokazu Nakagawa | 1994-08-16 |