Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9274436 | Lithographic apparatus and a device manufacturing method | Theodorus Wilhelmus Polet, Henrikus Herman Marie Cox, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2016-03-01 |
| 9081311 | Lithographic apparatus and device manufacturing method | Herman Vogel, Jeroen Gerard Gosen, Bart Dinand Paarhuis, Jinggao Li | 2015-07-14 |
| 8988657 | Lithographic apparatus and device manufacturing method | Jeroen Gerard Gosen, Anthonie Kuijper, Arjan Hubrecht Josef Anna Martens, Jean-Philippe Xavier Van Damme, Peter Schoenmakers +4 more | 2015-03-24 |
| 8810769 | Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus | Jeroen Gerard Gosen, Antonius Johannus Van Der Net, Bart Dinand Paarhuis, Jinggao Li | 2014-08-19 |
| 8675170 | Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method | Pieter Debrauwer, Antonius Arnoldus Henricus Van Der Steen, Robin Bernardus Johannes Koldeweij | 2014-03-18 |
| 8675169 | Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method | Marinus Johannes Maria Van Dam, Johannes Christiaan Maria Jasper, Ronald Van Der Ham, Sergei Shulepov, Gerben Pieterse +3 more | 2014-03-18 |