Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8675169 | Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method | Frank Johannes Jacobus Van Boxtel, Marinus Johannes Maria Van Dam, Johannes Christiaan Maria Jasper, Ronald Van Der Ham, Sergei Shulepov +3 more | 2014-03-18 |
| 8675170 | Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method | Frank Johannes Jacobus Van Boxtel, Antonius Arnoldus Henricus Van Der Steen, Robin Bernardus Johannes Koldeweij | 2014-03-18 |