| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more |
2008-04-01 |
| 7280228 |
System and method of measurement, system and method of alignment, lithographic apparatus and method |
Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Jeroen Thomas Broekhuijse, Sigurd Dressler, Edwin Eduard Nicolaas Josephus Krijnen +3 more |
2007-10-09 |
| 7248334 |
Sensor shield |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more |
2007-07-24 |
| 7224436 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2007-05-29 |
| 7213963 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2007-05-08 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko +12 more |
2007-04-03 |
| 7196770 |
Prewetting of substrate before immersion exposure |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk |
2007-03-27 |
| 7193681 |
Lithographic apparatus and device manufacturing method |
Erik Theodorus Maria Bijlaart, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk |
2007-03-20 |
| 7161654 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk |
2007-01-09 |
| 7161663 |
Lithographic apparatus |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk |
2007-01-09 |
| 7133114 |
Lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Frits Van Der Meulen, Johannes Henricus Wilhelmus Jacobs |
2006-11-07 |
| 7119876 |
Lithographic apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn |
2006-10-10 |
| 7119874 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Helmar Van Santen |
2006-10-10 |
| 7116401 |
Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing method |
Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Roeland Nicolaas Maria Vanneer |
2006-10-03 |
| 7075616 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2006-07-11 |
| 7034917 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Johannes Jacobus Matheus Baselmans, Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Johannes Catharinus Hubertus Mulkens +1 more |
2006-04-25 |
| 6952253 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2005-10-04 |