Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8208120 | Lithographic apparatus and device manufacturing method | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +8 more | 2012-06-26 |
| 8154708 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2012-04-10 |
| 8115926 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell, and device manufacturing method to measure a property of a substrate | — | 2012-02-14 |
| 7982850 | Immersion lithographic apparatus and device manufacturing method with gas supply | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more | 2011-07-19 |
| 7936444 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more | 2011-05-03 |
| 7932999 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more | 2011-04-26 |
| 7839506 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Ronald Franciscus Herman Hugers | 2010-11-23 |
| 7738074 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon | 2010-06-15 |
| 7701577 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Ronald Franciscus Herman Hugers | 2010-04-20 |
| 7593092 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more | 2009-09-22 |
| 7593093 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more | 2009-09-22 |
| 7511884 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Donis Flagello, Kevin Cummings | 2009-03-31 |
| 7491478 | Lithographic apparatus and device manufacturing method | Erik Petrus Buurman, Jozef Maria Finders, J. W. De Klerk | 2009-02-17 |
| 7388648 | Lithographic projection apparatus | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more | 2008-06-17 |
| 7372541 | Lithographic apparatus and device manufacturing method | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +8 more | 2008-05-13 |
| 7352434 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more | 2008-04-01 |
| 7317507 | Lithographic apparatus and device manufacturing method | — | 2008-01-08 |
| 7224436 | Lithographic apparatus and device manufacturing method | Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more | 2007-05-29 |
| 7221501 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Donis Flagello, Kevin Cummings | 2007-05-22 |
| 7213963 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2007-05-08 |
| 7206059 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Donis Flagello, Kevin Cummings, Marcel Mathijs Theodore Marie Dierichs | 2007-04-17 |
| 7199858 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more | 2007-04-03 |
| 7158211 | Lithographic apparatus and device manufacturing method | — | 2007-01-02 |
| 7110081 | Lithographic apparatus and device manufacturing method | Christian Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Antonius Theodorus Anna Maria Derksen +4 more | 2006-09-19 |
| 7075616 | Lithographic apparatus and device manufacturing method | Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more | 2006-07-11 |