Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7038760 | Lithographic apparatus and device manufacturing method | Johannes Catharinus Hubertus Mulkens, Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Bob Streefkerk | 2006-05-02 |
| 6952253 | Lithographic apparatus and device manufacturing method | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more | 2005-10-04 |
| 6730920 | Abbe arm calibration system for use in lithographic apparatus | Rogier Herman Mathijs Groeneveld, Erik Roelof Loopstra, Jacobus Burghoom, Leon Martin Levasier | 2004-05-04 |
| 6084673 | Lithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holders | Marinus Aart Van Den Brink | 2000-07-04 |
| 6020964 | Interferometer system and lithograph apparatus including an interferometer system | Erik Roelof Loopstra | 2000-02-01 |
| 5986742 | Lithographic scanning exposure projection apparatus | Ronald A. M. De Jager | 1999-11-16 |
| 5889580 | Scanning-slit exposure device | Johannes C.M. Jasper | 1999-03-30 |
| 5602683 | Lens system with lens elements arranged in a gas-filled holder and photolithographic apparatus including such a system | Jan W. D. Martens | 1997-02-11 |