Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8670106 | Optical imaging writer system | Jang Fung Chen | 2014-03-11 |
| 8395752 | Optical imaging writer system | — | 2013-03-12 |
| 8390781 | Optical imaging writer system | — | 2013-03-05 |
| 8390786 | Optical imaging writer system | — | 2013-03-05 |
| 8253923 | Optical imaging writer system | Jang Fung Chen | 2012-08-28 |
| 8132130 | Method, program product and apparatus for performing mask feature pitch decomposition for use in a multiple exposure process | Jang Fung Chen, Duan-Fu Stephen Hsu, Douglas Van Den Broeke | 2012-03-06 |
| 8039180 | Scattering bar OPC application method for sub-half wavelength lithography patterning | Kurt E. Wampler, Douglas Van Den Broeke, Jang Fung Chen | 2011-10-18 |
| 7892707 | Scattering bar OPC application method for sub-half wavelength lithography patterning | Kurt E. Wampler, Douglas Van Den Broeke, Jang Fung Chen | 2011-02-22 |
| 7892703 | CPL mask and a method and program product for generating the same | Jang Fung Chen, Duan-Fu Stephen Hsu, Douglas Van Den Broeke, Jung Chul Park | 2011-02-22 |
| 7856606 | Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems | Markus Franciscus Antonius Eurlings, Melchior Mulder, Uwe Hollerbach | 2010-12-21 |
| 7820341 | Method of two dimensional feature model calibration and optimization | Jang Fung Chen, Xuelong Shi, Ralph Schlief, Uwe Hollerbach, Kurt E. Wampler | 2010-10-26 |
| 7774736 | Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography | Douglas Broeke, Jang Fung Chen, Kurt E. Wampler, Stephen Hsu | 2010-08-10 |
| 7550235 | Method and apparatus for performing model based placement of phase-balanced scattering bars for sub-wavelength optical lithography | Xuelong Shi, Jang Fung Chen, Kurt E. Wampler, Douglas Van Den Broeke | 2009-06-23 |
| 7549140 | Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography | Doug Van Den Broeke, Jang Fung Chen, Kurt E. Wampler, Stephen Hsu | 2009-06-16 |
| 7523438 | Method for improved lithographic patterning utilizing optimized illumination conditions and high transmission attenuated PSM | Michael S. Hsu, Stephen Hsu, Douglas Van Den Broeke, Jang Fung Chen | 2009-04-21 |
| 7485396 | Scattering bar OPC application method for sub-half wavelength lithography patterning | Kurt E. Wampler, Douglas Van Den Broeke, Jang Fung Chen | 2009-02-03 |
| 7434195 | Method for performing full-chip manufacturing reliability checking and correction | Michael S. Hsu, Kurt E. Wampler, Duan-Fu Stephen Hsu, Xuelong Shi | 2008-10-07 |
| 7398508 | Eigen decomposition based OPC model | Xuelong Shi, Robert John Socha, Douglas Van Den Broeke | 2008-07-08 |
| 7354681 | Scattering bar OPC application method for sub-half wavelength lithography patterning | Kurt E. Wampler, Douglas Van Den Broeke, Jang Fung Chen | 2008-04-08 |
| 7355681 | Optical proximity correction using chamfers and rounding at corners | Markus Franciscus Antonius Eurlings | 2008-04-08 |
| 7349066 | Apparatus, method and computer program product for performing a model based optical proximity correction factoring neighbor influence | Markus Franciscus Antonius Eurlings, Uwe Hollerbach | 2008-03-25 |
| 7247574 | Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography | Douglas Broeke, Jang Fung Chen, Kurt E. Wampler, Stephen Hsu | 2007-07-24 |
| 7231629 | Feature optimization using enhanced interference mapping lithography | — | 2007-06-12 |
| 7175940 | Method of two dimensional feature model calibration and optimization | Jang Fung Chen, Xuelong Shi, Ralph Schlief, Uwe Hollerbach, Kurt E. Wampler | 2007-02-13 |
| 6951701 | Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM | Michael S. Hsu, Stephen Hsu, Douglas Van Den Broeke, Jang Fung Chen | 2005-10-04 |