Issued Patents All Time
Showing 26–50 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416550 | Method to reduce line waviness | Joseph R. Johnson, Christopher Dennis Bencher | 2019-09-17 |
| 10409172 | Digital photolithography using compact eye module layout | David A. Markle, Timothy N. Thomas | 2019-09-10 |
| 10379450 | Apparatus and methods for on-the-fly digital exposure image data modification | Benjamin M. Johnston, Jang Fung Chen, John M. White | 2019-08-13 |
| 10372042 | Resolution enhanced digital lithography with anti-blazed DMD | Hwan J. Jeong | 2019-08-06 |
| 10331038 | Real time software and array control | Uwe Hollerbach, Mark Hunt, Don STARSES | 2019-06-25 |
| 10289003 | Line edge roughness reduction via step size alteration | Joseph R. Johnson, Christopher Dennis Bencher | 2019-05-14 |
| 10114297 | Active eye-to-eye with alignment by X-Y capacitance measurement | Jeffrey Kaskey | 2018-10-30 |
| 10037589 | Parallel image processing system | Barry P. Keane | 2018-07-31 |
| 10036966 | Environmental control of systems for photolithography process | Benjamin M. Johnston, John M. White | 2018-07-31 |
| 10031427 | Methods and apparatus for vibration damping stage | Benjamin M. Johnston, Jeffrey Kaskey | 2018-07-24 |
| 9927696 | Method to reduce line waviness | Joseph R. Johnson, Christopher Dennis Bencher | 2018-03-27 |
| 9927723 | Apparatus and methods for on-the-fly digital exposure image data modification | Benjamin M. Johnston, Jang Fung Chen, John M. White | 2018-03-27 |
| 9907152 | Illumination system with monitoring optical output power | Jeffrey Kaskey, David A. Markle, Jang Fung Chen | 2018-02-27 |
| 9823573 | Correction of non-uniform patterns using time-shifted exposures | Joseph R. Johnson, Christopher Dennis Bencher | 2017-11-21 |
| 9818168 | Data tuning for fast computation and polygonal manipulation simplification | — | 2017-11-14 |
| 9791786 | Method to reduce line waviness | Joseph R. Johnson, Christopher Dennis Bencher | 2017-10-17 |
| 9733573 | Optical projection array exposure system | David A. Markle, Jeffrey Kaskey, Jang Fung Chen | 2017-08-15 |
| 9519226 | Optical imaging writer system | Jang Fung Chen | 2016-12-13 |
| 9507271 | System and method for manufacturing multiple light emitting diodes in parallel | Jang Fung Chen | 2016-11-29 |
| 9405203 | Pixel blending for multiple charged-particle beam lithography | Jang Fung Chen | 2016-08-02 |
| 9250509 | Optical projection array exposure system | David A. Markle, Jeffrey Kaskey, Jang Fung Chen | 2016-02-02 |
| 9158190 | Optical imaging writer system | Jang Fung Chen | 2015-10-13 |
| 9025136 | System and method for manufacturing three dimensional integrated circuits | Jang Fung Chen | 2015-05-05 |
| 8914143 | Method and system for handling substrates | Jeffrey Kaskey, Dave Markle, Jang Fung Chen | 2014-12-16 |
| 8669989 | Parallel image processing system | Barry P. Keane | 2014-03-11 |