| 12372779 |
Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems |
Thomas Laidig, Christopher Dennis Bencher, Hwan J. Jeong |
2025-07-29 |
| 12360467 |
Dynamic generation of layout adaptive packaging |
Thomas Laidig |
2025-07-15 |
| 12242789 |
Overlaying on locally dispositioned patterns by ML based dynamic digital corrections (ML-DDC) |
Tamer Coskun, Aidyn Kemeldinov, Chung-Shin Kang, Thomas Laidig |
2025-03-04 |
| 11934762 |
Overlaying on locally dispositioned patterns by ML based dynamic digital corrections (ML-DDC) |
Tamer Coskun, Aidyn Kemeldinov, Chung-Shin Kang, Thomas Laidig |
2024-03-19 |
| 11899379 |
Dynamic generation of layout adaptive packaging |
Thomas Laidig |
2024-02-13 |
| 11899198 |
Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems |
Thomas Laidig, Christopher Dennis Bencher, Hwan J. Jeong |
2024-02-13 |
| 11599032 |
Dynamic generation of layout adaptive packaging |
Thomas Laidig |
2023-03-07 |
| 10678150 |
Dynamic generation of layout adaptive packaging |
Thomas Laidig |
2020-06-09 |
| 10331038 |
Real time software and array control |
Thomas Laidig, Mark Hunt, Don STARSES |
2019-06-25 |
| 8799832 |
Optical proximity correction for topographically non-uniform substrates |
Yuri Granik, Konstantinos Adam |
2014-08-05 |
| 7856606 |
Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems |
Markus Franciscus Antonius Eurlings, Melchior Mulder, Thomas Laidig |
2010-12-21 |
| 7820341 |
Method of two dimensional feature model calibration and optimization |
Thomas Laidig, Jang Fung Chen, Xuelong Shi, Ralph Schlief, Kurt E. Wampler |
2010-10-26 |
| 7376930 |
Method, program product and apparatus for generating assist features utilizing an image field map |
Kurt E. Wampler, Douglas Van Den Broeke, Xuelong Shi, Jang Fung Chen |
2008-05-20 |
| 7349066 |
Apparatus, method and computer program product for performing a model based optical proximity correction factoring neighbor influence |
Markus Franciscus Antonius Eurlings, Thomas Laidig |
2008-03-25 |
| 7175940 |
Method of two dimensional feature model calibration and optimization |
Thomas Laidig, Jang Fung Chen, Xuelong Shi, Ralph Schlief, Kurt E. Wampler |
2007-02-13 |
