Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372881 | Deep learning based adaptive alignment precision metrology for digital overlay | Tamer Coskun, Yen-Shuo Lin | 2025-07-29 |
| 12242789 | Overlaying on locally dispositioned patterns by ML based dynamic digital corrections (ML-DDC) | Tamer Coskun, Chung-Shin Kang, Uwe Hollerbach, Thomas Laidig | 2025-03-04 |
| 11934762 | Overlaying on locally dispositioned patterns by ML based dynamic digital corrections (ML-DDC) | Tamer Coskun, Chung-Shin Kang, Uwe Hollerbach, Thomas Laidig | 2024-03-19 |