Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10496780 | Dynamic model generation for lithographic simulation | Michael C. Lam, Germain Louis Fenger, Ananthan Raghunathan, Christopher Heinz Clifford | 2019-12-03 |
| 10445452 | Simulation-assisted wafer rework determination | John L. Sturtevant, Shumay D. Shang | 2019-10-15 |
| 9857693 | Lithography model calibration via cache-based niching genetic algorithms | Huikan Liu, Nicolas B. Cobb | 2018-01-02 |
| 9678435 | Horizontal development bias in negative tone development of photoresist | Yunfei Deng, Yuri Granik, Dmitry Medvedev, Yuan He | 2017-06-13 |
| 8799832 | Optical proximity correction for topographically non-uniform substrates | Yuri Granik, Uwe Hollerbach | 2014-08-05 |
| RE44792 | Rapid scattering simulation of objects in imaging using edge domain decomposition | — | 2014-03-04 |
| 8645880 | Sum of coherent systems (SOCS) approximation based on object information | — | 2014-02-04 |
| 8539393 | Simulation and correction of mask shadowing effect | James Word, Michael C. Lam, Sergiy Komirenko | 2013-09-17 |
| 7836423 | Sum of coherent systems (SOCS) approximation based on object information | — | 2010-11-16 |
| 7539954 | OPC simulation model using SOCS decomposition of edge fragments | — | 2009-05-26 |
| 7536660 | OPC simulation model using SOCS decomposition of edge fragments | — | 2009-05-19 |