Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6851103 | Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography | Doug Van Den Broeke, Jang Fung Chen, Kurt E. Wampler, Stephen Hsu | 2005-02-01 |
| 6835510 | Hybrid phase-shift mask | Jang Fung Chen, Roger Caldwell, Kurt E. Wampler | 2004-12-28 |
| 6670081 | Optical proximity correction method utilizing serifs having variable dimensions | Kurt E. Wampler | 2003-12-30 |
| 6623895 | Hybrid phase-shift mask | Jang Fung Chen, Roger Caldwell, Kurt E. Wampler | 2003-09-23 |
| 5887155 | Vertex based geometry engine system for use in integrated circuit design | — | 1999-03-23 |
| 5821014 | Optical proximity correction method for intermediate-pitch features using sub-resolution scattering bars on a mask | Jang Fung Chen, Kurt E. Wampler | 1998-10-13 |
| 5663893 | Method for generating proximity correction features for a lithographic mask pattern | Kurt E. Wampler | 1997-09-02 |