Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835510 | Hybrid phase-shift mask | Jang Fung Chen, Thomas Laidig, Kurt E. Wampler | 2004-12-28 |
| 6833954 | Lithographic method for manufacturing a mask used in the fabrication of a fiber Bragg grating | Jason Zweiback, Joshua E. Rothenberg, Jan Popelek | 2004-12-21 |
| 6623895 | Hybrid phase-shift mask | Jang Fung Chen, Thomas Laidig, Kurt E. Wampler | 2003-09-23 |
| 6482555 | Method of patterning sub-0.25&lgr; line features with high transmission, “attenuated” phase shift masks | J. Fung Chen, Tom Laidig, Kurt E. Wampler | 2002-11-19 |
| 6312854 | "Method of patterning sub-0.25 lambda line features with high transmission, ""attenuated"" phase shift masks" | J. Fung Chen, Tom Laidig, Kurt E. Wampler | 2001-11-06 |
| 6016012 | Thin liner layer providing reduced via resistance | Ahmad Chatila, Kuantai Yeh, James M. Cleeves, Daniel Arnzen | 2000-01-18 |
| 5919141 | Vital sign remote monitoring device | Eugene W. Money, Michael J. Sciarra | 1999-07-06 |
| 5851887 | Deep sub-micron polysilicon gap formation | Jeffrey T. Watt | 1998-12-22 |
| 5640053 | Inverse open frame alignment mark and method of fabrication | — | 1997-06-17 |
| 5514622 | Method for the formation of interconnects and landing pads having a thin, conductive film underlying the plug or an associated contact of via hole | Johnathan G. Bornstein | 1996-05-07 |
| 5503962 | Chemical-mechanical alignment mark and method of fabrication | — | 1996-04-02 |
| 5401691 | Method of fabrication an inverse open frame alignment mark | — | 1995-03-28 |