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Hybrid phase-shift mask |
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2004-12-28 |
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Lithographic method for manufacturing a mask used in the fabrication of a fiber Bragg grating |
Jason Zweiback, Joshua E. Rothenberg, Jan Popelek |
2004-12-21 |
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Hybrid phase-shift mask |
Jang Fung Chen, Thomas Laidig, Kurt E. Wampler |
2003-09-23 |
| 6482555 |
Method of patterning sub-0.25&lgr; line features with high transmission, “attenuated” phase shift masks |
J. Fung Chen, Tom Laidig, Kurt E. Wampler |
2002-11-19 |
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"Method of patterning sub-0.25 lambda line features with high transmission, ""attenuated"" phase shift masks" |
J. Fung Chen, Tom Laidig, Kurt E. Wampler |
2001-11-06 |
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Thin liner layer providing reduced via resistance |
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Vital sign remote monitoring device |
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Deep sub-micron polysilicon gap formation |
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1998-12-22 |
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Inverse open frame alignment mark and method of fabrication |
— |
1997-06-17 |
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Method for the formation of interconnects and landing pads having a thin, conductive film underlying the plug or an associated contact of via hole |
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1996-05-07 |
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Chemical-mechanical alignment mark and method of fabrication |
— |
1996-04-02 |
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Method of fabrication an inverse open frame alignment mark |
— |
1995-03-28 |
