Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7399559 | Optical proximity correction method utilizing phase-edges as sub-resolution assist features | Douglas Broeke | 2008-07-15 |
| 7026081 | Optical proximity correction method utilizing phase-edges as sub-resolution assist features | Douglas Van Den Broeke | 2006-04-11 |
| 6788400 | Method and apparatus for detecting aberrations in an optical system | — | 2004-09-07 |
| 6753954 | Method and apparatus for detecting aberrations in a projection lens utilized for projection optics | — | 2004-06-22 |
| 6482555 | Method of patterning sub-0.25&lgr; line features with high transmission, “attenuated” phase shift masks | Roger Caldwell, Tom Laidig, Kurt E. Wampler | 2002-11-19 |
| 6335130 | System and method of providing optical proximity correction for features using phase-shifted halftone transparent/semi-transparent features | John S. Petersen | 2002-01-01 |
| 6312854 | "Method of patterning sub-0.25 lambda line features with high transmission, ""attenuated"" phase shift masks" | Roger Caldwell, Tom Laidig, Kurt E. Wampler | 2001-11-06 |
| 6114071 | Method of fine feature edge tuning with optically-halftoned mask | Kurt E. Wampler, Tom Laidig | 2000-09-05 |
| 6115500 | Method and device for compressing image data | Chao-Shuenn Hsu | 2000-09-05 |
| 5707765 | Photolithography mask using serifs and method thereof | — | 1998-01-13 |