| 6835048 |
Ion pump having secondary magnetic field |
Charles Perkins |
2004-12-28 |
| 5993613 |
Method and apparatus for periodic polarity reversal during an active state |
— |
1999-11-30 |
| 5980707 |
Apparatus and method for a magnetron cathode with moving magnet assembly |
— |
1999-11-09 |
| 5882492 |
A.C. plasma processing system |
Keith Billings |
1999-03-16 |
| 5855745 |
Plasma processing system utilizing combined anode/ ion source |
— |
1999-01-05 |
| 5815388 |
Polarity reversing circuit having energy compensation |
Keith Billings, Lance Collins |
1998-09-29 |
| 5798027 |
Process for depositing optical thin films on both planar and non-planar substrates |
Paul Lefebvre, James W. Seeser, Richard I. Seddon, Michael A. Scobey |
1998-08-25 |
| 5682067 |
Circuit for reversing polarity on electrodes |
Keith Billings |
1997-10-28 |
| 5415754 |
Method and apparatus for sputtering magnetic target materials |
— |
1995-05-16 |
| 5262028 |
Planar magnetron sputtering magnet assembly |
— |
1993-11-16 |
| 5225057 |
Process for depositing optical films on both planar and non-planar substrates |
Paul Lefebvre, James W. Seeser, Richard I. Seddon, Michael A. Scobey |
1993-07-06 |
| 4851095 |
Magnetron sputtering apparatus and process |
Michael A. Scobey, Richard I. Seddon, James W. Seeser, R. Russel Austin, Paul Lefebvre |
1989-07-25 |