Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437479 | Methods for forming an interconnect pattern on a substrate | Mehul Naik | 2016-09-06 |
| 9184333 | Contact and interconnect metallization for solar cells | Jen Shu, James M. Gee | 2015-11-10 |
| 9099584 | Integrated three-dimensional and planar metallization structure for thin film solar cells | Nevran Ozguven, Duncan Harwood, Mehrdad M. Moslehi | 2015-08-04 |
| 9053957 | Structure and method for creating a reusable template for detachable thin film substrates | David Dutton, Pawan Kapur, Somnath Nag, Mehrdad M. Moslehi, Karl-Josef Kramer +2 more | 2015-06-09 |
| 8849438 | Factory level process and final product performance control system | Alexander T. Schwarm, Sanjiv Mittal, Charles Gay | 2014-09-30 |
| 8828517 | Structure and method for improving solar cell efficiency and mechanical strength | David Xuan-Qi Wang, Mehrdad M. Moslehi, Pawan Kapur | 2014-09-09 |
| 8476695 | Self aligned narrow storage elements for advanced memory device | — | 2013-07-02 |
| 8445314 | Method of creating reusable template for detachable thin film substrate | David Dutton, Pawan Kapur, Somnath Nag, Mehrdad M. Moslehi, Joe Kramer +2 more | 2013-05-21 |
| 8409952 | Method of forming an electronic device including forming a charge storage element in a trench of a workpiece | Olov Karlsson, Yun-Ju Sun, Shankar Sinha, Timothy Thurgate | 2013-04-02 |
| 8005634 | Copper wiring module control | Arulkumar Shanmugasundram | 2011-08-23 |
| 7781154 | Method of forming damascene structure | — | 2010-08-24 |
| 7682905 | Self aligned narrow storage elements for advanced memory device | — | 2010-03-23 |
| 7572734 | Etch depth control for dual damascene fabrication process | Mehul Naik, Michael D. Armacost | 2009-08-11 |
| 7205228 | Selective metal encapsulation schemes | Deenesh Padhi, Srinivas Gandikota, Mehul Naik, Girish Dixit | 2007-04-17 |
| 7074626 | Method and apparatus for providing intra-tool monitoring and control | Robin Cheung | 2006-07-11 |
| 6940170 | Techniques for triple and quadruple damascene fabrication | — | 2005-09-06 |
| 6842659 | Method and apparatus for providing intra-tool monitoring and control | Robin Cheung | 2005-01-11 |
| 6656840 | Method for forming silicon containing layers on a substrate | Nagarajan Rajagopalan, Joe Feng, Christopher S. Ngai, Meiyee Shek, Linh Thanh | 2003-12-02 |
| 6594540 | Misalignment tolerant techniques for dual damascene fabrication | — | 2003-07-15 |
| 6514671 | Interconnect line formed by dual damascene using dielectric layers having dissimilar etching characteristics | Mehul Naik, Samuel Broydo, H. Peter W. Hey | 2003-02-04 |
| 6391771 | Integrated circuit interconnect lines having sidewall layers | Mehul Naik | 2002-05-21 |
| 6225207 | Techniques for triple and quadruple damascene fabrication | — | 2001-05-01 |
| 6127263 | Misalignment tolerant techniques for dual damascene fabrication | — | 2000-10-03 |