Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967996 | Process for wafer backside polymer removal and wafer front side photoresist removal | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Shahid Rauf, Ajit Balakrishna +6 more | 2011-06-28 |
| 7879183 | Apparatus and method for front side protection during backside cleaning | Imad Yousif, Ying Rui, Nancy Fung, Ajit Balakrishna, Anchel Sheyner +2 more | 2011-02-01 |
| 7846497 | Method and apparatus for controlling gas flow to a processing chamber | Ezra Robert Gold, Richard Fovell, James P. Cruse, Jared Ahmad Lee, Bruno Geoffrion +1 more | 2010-12-07 |
| 7775236 | Method and apparatus for controlling gas flow to a processing chamber | Ezra Robert Gold, Richard Fovell, James P. Cruse, Jared Ahmad Lee, Bruno Geoffrion +1 more | 2010-08-17 |
| 7552736 | Process for wafer backside polymer removal with a ring of plasma under the wafer | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Ajit Balakrishna, David Palagashvili +7 more | 2009-06-30 |