Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10399201 | Advanced polishing pads having compositional gradients by use of an additive manufacturing process | Sivapackia Ganapathiappan, Boyi Fu, Ashwin CHOCKALINGAM, Daniel Redfield, Rajeev Bajaj +3 more | 2019-09-03 |
| 10391605 | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process | Sivapackia Ganapathiappan, Boyi Fu, Ashwin CHOCKALINGAM, Daniel Redfield, Rajeev Bajaj +3 more | 2019-08-27 |
| 10384330 | Polishing pads produced by an additive manufacturing process | Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more | 2019-08-20 |
| 10076817 | Orbital polishing with small pad | Hung Chih Chen, Paul D. Butterfield, Jay Gurusamy, Shou-Sung Chang, Jimin Zhang +1 more | 2018-09-18 |
| 9873180 | CMP pad construction with composite material properties using additive manufacturing processes | Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more | 2018-01-23 |
| 9776361 | Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles | Kasiraman Krishnan, Daniel Redfield, Russell Edward Perry, Gregory E. Menk, Rajeev Bajaj +3 more | 2017-10-03 |
| 9308623 | Multi-disk chemical mechanical polishing pad conditioners and methods | Hung Chih Chen, Shou-Sung Chang, Matthew A. Gallelli, Paul D. Butterfield, Kevin Chou | 2016-04-12 |
| 9138860 | Closed-loop control for improved polishing pad profiles | Sivakumar Dhandapani, Jun Qian, Christopher Cocca, Shou-Sung Chang, Charles C. Garretson +2 more | 2015-09-22 |
| 9017138 | Retaining ring monitoring and control of pressure | Hung Chih Chen, Thomas H. Osterheld, Charles C. Garretson | 2015-04-28 |
| 8337279 | Closed-loop control for effective pad conditioning | Sivakumar Dhandapani, Stan Tsai, Daxin Mao, Sameer Deshpande, Shou-Sung Chang +4 more | 2012-12-25 |