Issued Patents All Time
Showing 101–110 of 110 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5618382 | High-frequency semiconductor wafer processing apparatus and method | Donald M. Mintz, Sasson Somekh, Dan Maydan, Kenneth S. Collins | 1997-04-08 |
| 5614060 | Process and apparatus for etching metal in integrated circuit structure with high selectivity to photoresist and good metal etch residue removal | — | 1997-03-25 |
| 5585729 | Fluid concentration detecting apparatus | Masato Toshima, Jerry Wong | 1996-12-17 |
| 5540824 | Plasma reactor with multi-section RF coil and isolated conducting lid | Gerald Yin, Diana Xiabing Ma, Donald Olgado | 1996-07-30 |
| 5451784 | Composite diagnostic wafer for semiconductor wafer processing systems | Peter Loewenhardt, Gerald Yin | 1995-09-19 |
| 5449432 | Method of treating a workpiece with a plasma and processing reactor having plasma igniter and inductive coupler for semiconductor fabrication | — | 1995-09-12 |
| 5431799 | Collimation hardware with RF bias rings to enhance sputter and/or substrate cavity ion generation efficiency | Roderick C. Mosely, Ivo Raaijmakers | 1995-07-11 |
| 5223457 | High-frequency semiconductor wafer processing method using a negative self-bias | Donald M. Mintz, Sasson Someskh, Dan Maydan | 1993-06-29 |
| 5108569 | Process and apparatus for forming stoichiometric layer of a metal compound by closed loop voltage controlled reactive sputtering | Haim Gilboa, Roderick C. Mosely | 1992-04-28 |
| 4882129 | Ozone generator cell | Dana G. Andrews | 1989-11-21 |