Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5202008 | Method for preparing a shield to reduce particles in a physical vapor deposition chamber | Humoyoun Talieh, Donald M. Mintz | 1993-04-13 |
| 5108569 | Process and apparatus for forming stoichiometric layer of a metal compound by closed loop voltage controlled reactive sputtering | Roderick C. Mosely, Hiroji Hanawa | 1992-04-28 |