Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5846332 | Thermally floating pedestal collar in a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 1998-12-08 |
| 5779807 | Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers | Anand Gupta, Gerald Girard | 1998-07-14 |
| 5705225 | Method of filling pores in anodized aluminum parts | Fred C. Redeker, Mark Fodor, Craig Bercaw, H. Steven Tomozawa | 1998-01-06 |
| 5680013 | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces | John M. White, Craig Bercaw, Hiroyuki Steven Tomosawa, Mark Fodor | 1997-10-21 |
| 5589003 | Shielded substrate support for processing chamber | Jun Zhao, Frank Chang | 1996-12-31 |
| 5558717 | CVD Processing chamber | Jun Zhao, Tom K. Cho, Stefan Wolff, Kevin Fairbairn, Xin Sheng Guo +2 more | 1996-09-24 |
| 5531835 | Patterned susceptor to reduce electrostatic force in a CVD chamber | Mark Fodor, Craig Bercaw | 1996-07-02 |
| 5496142 | Slotted conical spring washer | Mark Fodor, Craig Bercaw | 1996-03-05 |
| 5454903 | Plasma cleaning of a CVD or etch reactor using helium for plasma stabilization | Fred C. Redeker, John Y. Leong | 1995-10-03 |