Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6214160 | Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers | Charles Dornfest, Anand Gupta | 2001-04-10 |
| 5779807 | Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers | Charles Dornfest, Anand Gupta | 1998-07-14 |