Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5454903 | Plasma cleaning of a CVD or etch reactor using helium for plasma stabilization | Fred C. Redeker, Charles Dornfest | 1995-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5454903 | Plasma cleaning of a CVD or etch reactor using helium for plasma stabilization | Fred C. Redeker, Charles Dornfest | 1995-10-03 |