Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7201803 | Valve control system for atomic layer deposition chamber | Siqing Lu, Yu-Chia Chang, Dongxi Sun, Vinh Dang, Michael Yang +2 more | 2007-04-10 |
| 6734020 | Valve control system for atomic layer deposition chamber | Siqing Lu, Yu-Chia Chang, Dongxi Sun, Vinh Dang, Michael Yang +2 more | 2004-05-11 |
| 6660126 | Lid assembly for a processing system to facilitate sequential deposition techniques | Anh N. Nguyen, Michael Yang, Ming Xi, Hua Chung, Xiaoxiong Yuan +1 more | 2003-12-09 |
| 6596085 | Methods and apparatus for improved vaporization of deposition material in a substrate processing system | John V. Schmitt, Shih-Hung Li, Christophe Marcadal, Ling Chen | 2003-07-22 |
| 6494955 | Ceramic substrate support | Lawrence Chung-Lai Lei, Sal Umotoy, Xiaoxiong Yuan, Hongbee Teoh, Anh N. Nguyen +1 more | 2002-12-17 |
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Salvador P. Umotoy, Son Trinh, Chien-Teh Kao +4 more | 2002-10-08 |
| 6375748 | Method and apparatus for preventing edge deposition | Joseph Yudovsky, Tom Madar, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei +1 more | 2002-04-23 |
| 6299692 | Head for vaporizing and flowing various precursor materials onto semiconductor wafers during chemical vapor deposition | Vincent Ku, Ming Xi, Xiaoxiong Yuan, Anh N. Nguyen | 2001-10-09 |