| 9431503 |
Integrating transistors with different poly-silicon heights on the same die |
Chuan Lin, Hidehiko Shiraiwa, Lei Xue, Simon S. Chan, Kenichi Ohtsuka +2 more |
2016-08-30 |
| 9196624 |
Leakage reducing writeline charge protection circuit |
Mark Randolph, Sung-Yong Chung, Hidehiko Shiraiwa |
2015-11-24 |
| 8809206 |
Patterned dummy wafers loading in batch type CVD |
Rinji Sugino, Lei Xue, Kenichi Ohtsuka |
2014-08-19 |
| 8652907 |
Integrating transistors with different poly-silicon heights on the same die |
Chuan Lin, Hidehiko Shiraiwa, Lei Xue, Simon S. Chan, Kenichi Ohtsuka +2 more |
2014-02-18 |
| 8409994 |
Gate trim process using either wet etch or dry etch approach to target CD for selected transistors |
Jihwan P. Choi, Angela T. Hui |
2013-04-02 |
| 8067314 |
Gate trim process using either wet etch or dry etch approach to target CD for selected transistors |
Jihwan P. Choi, Angela T. Hui |
2011-11-29 |
| 7553727 |
Using implanted poly-1 to improve charging protection in dual-poly process |
Ming Sang Kwan, Jean Y. Yang, Zhizheng Liu, Yi He |
2009-06-30 |
| 6684122 |
Control mechanism for matching process parameters in a multi-chamber process tool |
Craig W. Christian, Allen L. Evans |
2004-01-27 |
| 6512991 |
Method and apparatus for reducing deposition variation by modeling post-clean chamber performance |
Allen L. Evans, Craig W. Christian |
2003-01-28 |
| 6492281 |
Method of fabricating conductor structures with metal comb bridging avoidance |
Shengnian Song, Sey-Ping Sun |
2002-12-10 |
| 6469518 |
Method and apparatus for determining measurement frequency based on hardware age and usage |
Allen L. Evans, Craig W. Christian |
2002-10-22 |
| 6403151 |
Method for controlling optical properties of antireflective coatings |
Craig W. Christian, Allen L. Evans |
2002-06-11 |
| 6257760 |
Using a superlattice to determine the temperature of a semiconductor fabrication process |
Shengnian Song, Sey-Ping Sun |
2001-07-10 |
| 6022749 |
Using a superlattice to determine the temperature of a semiconductor fabrication process |
Shengnian Song, Sey-Ping Sun |
2000-02-08 |
