Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for controlling optical properties of antireflective coatings

Method for controlling optical properties of antireflective coatings

US Patent 6403151 · Granted Jun 11, 2002

Estimated economic value: $2,353,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Integrating transistors with different poly-silicon heights on the same die2016
Leakage reducing writeline charge protection circuit2015
Patterned dummy wafers loading in batch type CVD2014
Integrating transistors with different poly-silicon heights on the same die2014
Electronic devices with ultraviolet blocking layers2014
Gate trim process using either wet etch or dry etch approach to target CD for se2013
Low-H plasma treatment with N2 anneal for electronic memory devices2012
Method of forming an electronic device2012
Gate trim process using either wet etch or dry etch approach to target CD for se2011
Using implanted poly-1 to improve charging protection in dual-poly process2009
Run-to-run control method for automated control of metal deposition processes2008
Control mechanism for matching process parameters in a multi-chamber process too2004