Issued Patents All Time
Showing 251–259 of 259 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6060380 | Antireflective siliconoxynitride hardmask layer used during etching processes in integrated circuit fabrication | Ramkumar Subramanian, Simon S. Chan, Fei Wang | 2000-05-09 |
| 6057239 | Dual damascene process using sacrificial spin-on materials | Fei Wang, James Kai | 2000-05-02 |
| 6057914 | Method for detecting and identifying a lens aberration by measurement of sidewall angles by atomic force microscopy | Sanjay K. Yedur, Bharath Rangarajan | 2000-05-02 |
| 6034771 | System for uniformly heating photoresist | Bharath Rangarajan, Sanjay K. Yedur, Michael K. Templeton | 2000-03-07 |
| 5977542 | Restoration of CD fidelity by dissipating electrostatic charge | Subash Gupta, Bryan K. Choo | 1999-11-02 |
| 5936307 | Surface modification method for film stress reduction | Diana M. Schonauer, Subhash Gupta, Paul R. Besser | 1999-08-10 |
| 5876903 | Virtual hard mask for etching | Che-Hoo Ng, Shekhar Pramanick, Subash Gupta | 1999-03-02 |
| 5841179 | Conductive layer with anti-reflective surface portion | Shekhar Pramanick, Che-Hoo Ng | 1998-11-24 |
| 5037506 | Method of stripping layers of organic materials | Subhash Gupta, Ahmad Waleh | 1991-08-06 |