Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642152 | Method for ultra thin resist linewidth reduction using implantation | Che-Hoo Ng, Scott A. Bell, Christopher Lee Pike | 2003-11-04 |
| 6387820 | BC13/AR chemistry for metal overetching on a high density plasma etcher | — | 2002-05-14 |
| 6333263 | Method of reducing stress corrosion induced voiding of patterned metal layers | Minh Van Ngo, Simon S. Chan, King Wai Kelwin Ko | 2001-12-25 |
| 6297065 | Method to rework device with faulty metal stack layer | Jiahua Huang, Pei-Yuan Gao | 2001-10-02 |
| 6274504 | Minimizing metal corrosion during post metal solvent clean | Jacques Bertrand | 2001-08-14 |
| 6251776 | Plasma treatment to reduce stress corrosion induced voiding of patterned metal layers | Minh Van Ngo, Simon S. Chan, King Wai Kelwin Ko | 2001-06-26 |
| 6174819 | Low temperature photoresist removal for rework during metal mask formation | Jeffrey A. Shields, Lewis Shen | 2001-01-16 |
| 6159863 | Insitu hardmask and metal etch in a single etcher | Susan H. Chen, Judi Quan Rizzuto | 2000-12-12 |
| 6066546 | Method to minimize particulate induced clamping failures | Jeffrey A. Shields | 2000-05-23 |