Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6159863 | Insitu hardmask and metal etch in a single etcher | Susan H. Chen, Anne E. Sanderfer | 2000-12-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6159863 | Insitu hardmask and metal etch in a single etcher | Susan H. Chen, Anne E. Sanderfer | 2000-12-12 |