Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6796517 | Apparatus for the application of developing solution to a semiconductor wafer | — | 2004-09-28 |
| 6642152 | Method for ultra thin resist linewidth reduction using implantation | Che-Hoo Ng, Scott A. Bell, Anne E. Sanderfer | 2003-11-04 |
| 6496596 | Method for detecting and categorizing defects | Steven J. Zika | 2002-12-17 |
| 6479879 | Low defect organic BARC coating in a semiconductor structure | Alexander H. Nickel | 2002-11-12 |
| 6475905 | Optimization of organic bottom anti-reflective coating (BARC) thickness for dual damascene process | Ramkumar Subramanian | 2002-11-05 |
| 6420097 | Hardmask trim process | Scott A. Bell | 2002-07-16 |
| 6410927 | Semiconductor wafer alignment method using an identification scribe | — | 2002-06-25 |
| 6411378 | Mask, structures, and method for calibration of patterned defect inspections | — | 2002-06-25 |
| 6326319 | Method for coating ultra-thin resist films | Khanh B. Nguyen, Christopher F. Lyons | 2001-12-04 |
| 6288411 | Defect collecting structures for photolithography | — | 2001-09-11 |
| 6281130 | Method for developing ultra-thin resist films | — | 2001-08-28 |
| 6257446 | Liquid chemical container with integrated fluid reservoir | — | 2001-07-10 |
| 6240874 | Integrated edge exposure and hot/cool plate for a wafer track system | — | 2001-06-05 |
| 6217936 | Semiconductor fabrication extended particle collection cup | — | 2001-04-17 |
| 6176274 | Method and system for measuring fluid volume in a photolithography track | Vincent L. Marinaro | 2001-01-23 |
| 6174632 | Wafer defect detection method utilizing wafer with development residue attracting area | — | 2001-01-16 |
| 6100505 | Hotplate offset ring | — | 2000-08-08 |
| 5940651 | Drip catching apparatus for receiving excess photoresist developer solution | David A. Steele | 1999-08-17 |