| 6648201 |
Apparatus to reduce wasting of unused photoresist in semiconductor containers |
Ted Wakamiya, Gerry Peffer |
2003-11-18 |
| 6481277 |
Temperature control unit and sight glass |
Ted Wakamiya, Gerry Peffer |
2002-11-19 |
| 6418946 |
Apparatus for automatically cleaning resist nozzle |
Eric Kent, Ted Wakamiya |
2002-07-16 |
| 6361599 |
Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash |
Eric Kent |
2002-03-26 |
| 6318913 |
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer |
Ted Wakamiya, Eric Kent |
2001-11-20 |
| 6299688 |
Developer nozzle clean combs |
Eric Kent |
2001-10-09 |
| 6250822 |
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer |
Ted Wakamiya, Eric Kent |
2001-06-26 |
| 6245584 |
Method for detecting adjustment error in photolithographic stepping printer |
Eric Kent |
2001-06-12 |
| 6238747 |
Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash |
Eric Kent |
2001-05-29 |
| 6176274 |
Method and system for measuring fluid volume in a photolithography track |
Christopher Lee Pike |
2001-01-23 |
| 6170494 |
Method for automatically cleaning resist nozzle |
Eric Kent, Ted Wakamiya |
2001-01-09 |
| 6082379 |
Mechanism for cleaning an integrated circuit wafer hot plate while the hot plate is at operating temperature |
Eric Kent |
2000-07-04 |
| 6051348 |
Method for detecting malfunction in photolithographic fabrication track |
Eric Kent |
2000-04-18 |