Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648201 | Apparatus to reduce wasting of unused photoresist in semiconductor containers | Ted Wakamiya, Gerry Peffer | 2003-11-18 |
| 6481277 | Temperature control unit and sight glass | Ted Wakamiya, Gerry Peffer | 2002-11-19 |
| 6418946 | Apparatus for automatically cleaning resist nozzle | Eric Kent, Ted Wakamiya | 2002-07-16 |
| 6361599 | Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash | Eric Kent | 2002-03-26 |
| 6318913 | Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer | Ted Wakamiya, Eric Kent | 2001-11-20 |
| 6299688 | Developer nozzle clean combs | Eric Kent | 2001-10-09 |
| 6250822 | Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer | Ted Wakamiya, Eric Kent | 2001-06-26 |
| 6245584 | Method for detecting adjustment error in photolithographic stepping printer | Eric Kent | 2001-06-12 |
| 6238747 | Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash | Eric Kent | 2001-05-29 |
| 6176274 | Method and system for measuring fluid volume in a photolithography track | Christopher Lee Pike | 2001-01-23 |
| 6170494 | Method for automatically cleaning resist nozzle | Eric Kent, Ted Wakamiya | 2001-01-09 |
| 6082379 | Mechanism for cleaning an integrated circuit wafer hot plate while the hot plate is at operating temperature | Eric Kent | 2000-07-04 |
| 6051348 | Method for detecting malfunction in photolithographic fabrication track | Eric Kent | 2000-04-18 |