| 6648201 |
Apparatus to reduce wasting of unused photoresist in semiconductor containers |
Vincent L. Marinaro, Gerry Peffer |
2003-11-18 |
| 6481277 |
Temperature control unit and sight glass |
Gerry Peffer, Vincent L. Marinaro |
2002-11-19 |
| 6418946 |
Apparatus for automatically cleaning resist nozzle |
Vincent L. Marinaro, Eric Kent |
2002-07-16 |
| 6368985 |
Dual track/stepper interface configuration for wafer processing |
Vince L. Marinaro, Eric Kent |
2002-04-09 |
| 6360959 |
Dual resist dispense nozzle for wafer tracks |
Eric Kent, Vince L. Marinaro |
2002-03-26 |
| 6336960 |
System and method for purging air bubbles from filters |
Vince L. Marinaro, Eric Kent |
2002-01-08 |
| 6318913 |
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer |
Eric Kent, Vincent L. Marinaro |
2001-11-20 |
| 6250822 |
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer |
Eric Kent, Vincent L. Marinaro |
2001-06-26 |
| 6170494 |
Method for automatically cleaning resist nozzle |
Vincent L. Marinaro, Eric Kent |
2001-01-09 |