| D747557 |
Hearing protector |
Brenda M. Bonney, Scott T. Cheek, Nicolas A. Echeverri, Douglas D. Fletcher |
2016-01-12 |
|
| 9171693 |
Coated X-ray window |
Tomi Tuohimaa |
2015-10-27 |
|
| D736475 |
Hearing protector |
Douglas D. Fletcher, Scott T. Cheek, Brenda M. Bonney, Sean C. McGreevy |
2015-08-11 |
|
| 8837679 |
Supply of a liquid-metal target in X-ray generation |
Tomi Tuohimaa, Mikael Otendal |
2014-09-16 |
|
| 8681943 |
X-ray window |
Hans Hertz, Tomi Tuohimaa, Mikael Otendal |
2014-03-25 |
|
| 8085399 |
Systems and methods for a multiple angle light scattering (MALS) instrument having two-dimensional detector array |
John A. Adams, Scott Bloom, Victor Chan, Kristina M. Crousore, Joseph Gottlieb +2 more |
2011-12-27 |
|
| 8075732 |
EUV collector debris management |
William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, Alexander I. Ershov, William Oldham +1 more |
2011-12-13 |
$12,519,000 |
| 7931850 |
Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light |
Carmen S. Menoni, Jorge J. Rocca, Georgiy O. Vaschenko, Scott Bloom, Erik H. Anderson +1 more |
2011-04-26 |
|
| 7838854 |
Method and apparatus for EUV plasma source target delivery |
J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +2 more |
2010-11-23 |
$7,184,000 |
| 7616311 |
Systems and methods for a multiple angle light scattering (MALS) instrument having two-dimensional detector array |
John A. Adams, Scott Bloom, Victor Chan, Kristina M. Crousore, Joseph Gottlieb +2 more |
2009-11-10 |
|
| 7589337 |
LPP EUV plasma source material target delivery system |
Alexander N. Bykanov, J. Martin Algots, Oleh Khodykin, Norbert Bowering |
2009-09-15 |
$9,887,000 |
| 7554661 |
Systems and methods for detection and classification of waterborne particles using a multiple angle light scattering (MALS) instrument |
John A. Adams, Kristina M. Crousore, Cherish K. Teters |
2009-06-30 |
|
| 7405416 |
Method and apparatus for EUV plasma source target delivery |
J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +2 more |
2008-07-29 |
$7,494,000 |
| 7372056 |
LPP EUV plasma source material target delivery system |
Alexander N. Bykanov, J. Martin Algots, Oleh Khodykin |
2008-05-13 |
$8,800,000 |
| 7239686 |
Method and arrangement for producing radiation |
Magnus Berglund, Bjorn Hansson, Hans Hertz, Lars Rymell |
2007-07-03 |
|
| 7122816 |
Method and apparatus for EUV light source target material handling |
J. Martin Algots, Tae Hoon Chung |
2006-10-17 |
$16,743,000 |
| 6711233 |
Method and apparatus for generating X-ray or EUV radiation |
Hans Hertz |
2004-03-23 |
|
