Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light

Assignee

• Colorado State University
• University of California
• Jmar Technologies

Inventors

• Carmen S. Menoni (5 patents)
• Jorge J. Rocca (15 patents)
• Georgiy O. Vaschenko (28 patents)
• Scott Bloom (32 patents)
• Erik H. Anderson (4 patents)
• Weilun Chao (2 patents)
• Oscar Hemberg (42 patents)

View full patent text on Google Patents →