Issued Patents 2023
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823870 | PEALD titanium nitride with direct microwave plasma | Hanhong Chen, Arkaprava Dan, Kyoung Ha Kim, Philip Allan Kraus | 2023-11-21 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Tuan Nguyen +1 more | 2023-10-17 |
| 11761083 | Methods for controlling a flow pulse shape | Kevin Griffin, Hanhong Chen | 2023-09-19 |
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Mario D. Silvetti, Hari Ponnekanti | 2023-08-01 |
| 11670489 | Modular microwave source with embedded ground surface | James D. Carducci, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua | 2023-06-06 |
| 11626281 | PEALD nitride films | Hanhong Chen, Philip Allan Kraus | 2023-04-11 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more | 2023-02-21 |
| 11584993 | Thermally uniform deposition station | Jared Ahmad Lee, Sanjeev Baluja, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah | 2023-02-21 |
| 11583816 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Dhritiman Subha Kashyap, Michael R. Rice | 2023-02-21 |
| 11560624 | Precursor delivery system | — | 2023-01-24 |