Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834744 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2023-12-05 |
| 11815816 | Apparatus for post exposure bake of photoresist | Douglas A. Buchberger, Jr., John O. Dukovic, Srinivas D. Nemani | 2023-11-14 |
| 11735441 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Soonwook Jung, Martin Yue Choy, Soonam Park | 2023-08-22 |
| 11728139 | Process chamber for cyclic and selective material removal and etching | Toan Q. Tran, Soonam Park, Junghoon Kim | 2023-08-15 |
| 11715625 | Semiconductor processing chamber | Greg Toland, Kenneth D. Schatz, Laksheswar Kalita | 2023-08-01 |
| 11637002 | Methods and systems to enhance process uniformity | Saravjeet Singh, Alan Tso, Jingchun Zhang, Zihui Li, Hanshen Zhang | 2023-04-25 |
| 11609505 | Apparatus and methods for verification and re-use of process fluids | Mangesh Ashok BANGAR, Gautam Pisharody, Lancelot HUANG, Alan Tso, Douglas A. Buchberger, Jr. +3 more | 2023-03-21 |
| 11594428 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Zilu Weng, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2023-02-28 |
| 11591693 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2023-02-28 |
| 11587771 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Biraja P. Kanungo | 2023-02-21 |
| 11562890 | Corrosion resistant ground shield of processing chamber | Xiao-Ming He, Jennifer Y. Sun, Xiaowei Wu, Laksheswar Kalita, Soonam Park | 2023-01-24 |
| 11557464 | Semiconductor chamber coatings and processes | Laksheswar Kalita, Son T. Nguyen, Kenneth D. Schatz | 2023-01-17 |