Issued Patents 2022
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11275318 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Po-Chung Cheng | 2022-03-15 |
| 11275317 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien | 2022-03-15 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Tzung-Chi Fu +1 more | 2022-03-08 |
| 11269257 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2022-03-08 |
| 11243479 | Method of operating semiconductor apparatus and semiconductor apparatus | Hsiang Chen, Sheng-Kang Yu, Shang-Chieh Chien | 2022-02-08 |
| 11237482 | Process system and operating method thereof | Chao-Chen Chang, Shao-Wei Luo, Jen-Yang Chung, Shang-Chieh Chien, Po-Chung Cheng | 2022-02-01 |
| 11226564 | EUV light source and apparatus for lithography | Jhan-Hong YEH, Cheng-Chieh Chen, Jeng-Yann Tsay, Henry Yee Shian Tong, Wen-Chih Wang +1 more | 2022-01-18 |
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2022-01-11 |