Issued Patents 2022
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538939 | Controlled bottom junctions | Ruilong Xie, Juntao Li, Kangguo Cheng | 2022-12-27 |
| 11437317 | Single-mask alternating line deposition | Lawrence A. Clevenger, Christopher J. Penny, Kisik Choi, Nicholas Anthony Lanzillo, Robert R. Robison | 2022-09-06 |
| 11430735 | Barrier removal for conductor in top via integration scheme | Nicholas Anthony Lanzillo, Christopher J. Penny, Lawrence A. Clevenger, Kisik Choi, Robert R. Robison | 2022-08-30 |
| 11302575 | Subtractive line with damascene second line type | Christopher J. Penny, Lawrence A. Clevenger, Nicholas Anthony Lanzillo, Kisik Choi, Robert R. Robison | 2022-04-12 |
| 11295978 | Interconnects having spacers for improved top via critical dimension and overlay tolerance | Lawrence A. Clevenger, Nicholas Anthony Lanzillo, Christopher J. Penny, Kisik Choi, Robert R. Robison | 2022-04-05 |
| 11289371 | Top vias with selectively retained etch stops | Lawrence A. Clevenger, Christopher J. Penny, Nicholas Anthony Lanzillo, Kisik Choi, Robert R. Robison | 2022-03-29 |
| 11282768 | Fully-aligned top-via structures with top-via trim | Kenneth Chun Kuen Cheng, Koichi Motoyama, Joseph F. Maniscalco | 2022-03-22 |
| 11276611 | Top via on subtractively etched conductive line | Lawrence A. Clevenger, Kisik Choi, Nicholas Anthony Lanzillo, Christopher J. Penny, Robert R. Robison | 2022-03-15 |
| 11276639 | Conductive lines with subtractive cuts | Lawrence A. Clevenger, Kisik Choi, Nicholas Anthony Lanzillo, Christopher J. Penny, Robert R. Robison | 2022-03-15 |
| 11271106 | Replacement metal gate process for vertical transport field-effect transistor with self-aligned shared contacts | Ruqiang Bao, Choonghyun Lee, Hemanth Jagannathan | 2022-03-08 |
| 11270913 | BEOL metallization formation | Chanro Park, Kenneth Chun Kuen Cheng, Koichi Motoyama, Somnath Ghosh | 2022-03-08 |
| 11257721 | Replacement metal gate process for vertical transport field-effect transistors with multiple threshold voltages | Ruqiang Bao, Hemanth Jagannathan, Choonghyun Lee | 2022-02-22 |
| 11239360 | Vertical transport field effect transistor structure with self-aligned top junction through early top source/drain epitaxy | Shogo Mochizuki, Hemanth Jagannathan, Junli Wang | 2022-02-01 |
| 11232977 | Stepped top via for via resistance reduction | Lawrence A. Clevenger, Christopher J. Penny, Kisik Choi, Nicholas Anthony Lanzillo, Robert R. Robison | 2022-01-25 |