SS

Shau-Lin Shue

TSMC: 18 patents #74 of 3,494Top 3%
Overall (2021): #2,306 of 548,734Top 1%
18
Patents 2021

Issued Patents 2021

Showing 1–18 of 18 patents

Patent #TitleCo-InventorsDate
11211256 Method with CMP for metal ion prevention Shih-Kang Fu, Ming-Han Lee 2021-12-28
11205618 Graphene barrier layer Shin-Yi Yang, Ming-Han Lee 2021-12-21
11201106 Semiconductor device with conductors embedded in a substrate Hsin-Ping Chen, Ming-Han Lee 2021-12-14
11189560 Semiconductor device comprising etch stop layer over dielectric layer and method of manufacture Shao-Kuan Lee, Hai-Ching Chen, Hsin-Yen Huang, Cheng-Chin Lee 2021-11-30
11167984 Nano-electromechanical system (NEMS) device structure and method for forming the same Hsin-Ping Chen, Carlos H. Diaz, Ken-Ichi Goto, Tai-I Yang 2021-11-09
11152255 Methods of performing chemical-mechanical polishing process in semiconductor devices Shih-Kang Fu, Ming-Han Lee 2021-10-19
11127680 Semiconductor device and manufacturing method thereof Shih-Kang Fu, Hsien-Chang Wu, Li-Lin Su, Ming-Han Lee 2021-09-21
11114374 Graphene enabled selective barrier layer formation Shin-Yi Yang, Guanyu Luo, Chin-Lung Chung, Ming-Han Lee 2021-09-07
11094631 Graphene layer for reduced contact resistance Shin-Yi Yang, Ming-Han Lee 2021-08-17
11094626 Methods of forming interconnect structures in semiconductor fabrication Ming-Han Lee 2021-08-17
11087994 Via connection to a partially filled trench Shih-Ming Chang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Chung-Ju Lee +1 more 2021-08-10
11081447 Graphene-assisted low-resistance interconnect structures and methods of formation thereof Shin-Yi Yang, Yu-Chen Chan, Ming-Han Lee, Hai-Ching Chen 2021-08-03
11075113 Metal capping layer and methods thereof Shao-Kuan Lee, Cheng-Chin Lee, Hsin-Yen Huang, Hai-Ching Chen 2021-07-27
11069526 Using a self-assembly layer to facilitate selective formation of an etching stop layer Shao-Kuan Lee, Hsin-Yen Huang, Yung-Hsu Wu, Cheng-Chin Lee, Hai-Ching Chen 2021-07-20
11011421 Semiconductor device having voids and method of forming same Yung-Hsu Wu, Chien-Hua Huang, Chung-Ju Lee, Tien-I Bao 2021-05-18
11004740 Structure and method for interconnection with self-alignment Tai-I Yang, Yu-Chieh Liao, Chia-Tien Wu, Hsin-Ping Chen, Hai-Ching Chen 2021-05-11
10991618 Semiconductor device and method of manufacture Tai-I Yang, Wei-Chen Chu, Yung-Chih Wang, Chia-Tien Wu, Hsin-Ping Chen 2021-04-27
10930551 Methods for fabricating a low-resistance interconnect Hsin-Yen Huang, Shao-Kuan Lee, Cheng-Chin Lee, Hsiang-Wei Liu, Tai-I Yang +2 more 2021-02-23