Issued Patents 2021
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175597 | Pellicle structure for lithography mask | Chiu-Hsiang Chen, Ru-Gun Liu, Minfeng Chen | 2021-11-16 |
| 11145519 | Mechanisms for forming patterns using multiple lithography processes | — | 2021-10-12 |
| 11137691 | Fixing blank mask defects by revising layouts | Wei-Hsuan Liang | 2021-10-05 |
| 11126774 | Layout optimization of a main pattern and a cut pattern | Kuei-Liang Lu | 2021-09-21 |
| 11106140 | Semiconductor apparatus and method of operating the same | Chiu-Hsiang Chen, Ru-Gun Liu | 2021-08-31 |
| 11087994 | Via connection to a partially filled trench | Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Chung-Ju Lee, Tien-I Bao +1 more | 2021-08-10 |
| 11054748 | Dummy insertion for improving throughput of electron beam lithography | Wen Lo, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou +2 more | 2021-07-06 |
| 11004855 | Buried metal track and methods forming same | Pochun Wang, Ting-Wei Chiang, Chih-Ming Lai, Hui-Zhong Zhuang, Jung-Chan Yang +6 more | 2021-05-11 |
| 10971363 | Method for forming semiconductor device structure | Chih-Ming Lai, Wei-Liang Lin, Chin-Yuan Tseng, Ru-Gun Liu | 2021-04-06 |
| 10962892 | Lithography process monitoring method | Chih-Jie Lee, Shih-Chun Huang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu | 2021-03-30 |
| 10930505 | Methods for integrated circuit design and fabrication | Tsong-Hua Ou, Ken-Hsien Hsieh, Wen-Chun Huang, Chih-Ming Lai, Ru-Gun Liu +1 more | 2021-02-23 |