Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175597 | Pellicle structure for lithography mask | Shih-Ming Chang, Ru-Gun Liu, Minfeng Chen | 2021-11-16 |
| 11106140 | Semiconductor apparatus and method of operating the same | Shih-Ming Chang, Ru-Gun Liu | 2021-08-31 |
| 10991657 | Method for fabricating semiconductor device | Shih-Chun Huang, Yung-Sung Yen, Ru-Gun Liu | 2021-04-27 |